| 摘要 |
According to the present invention, a nozzle assembly for a load port includes: a hollow housing which is combined with a stage of a load port, and has an upper hole and a lower hole; a nozzle which comprises a nozzle head which enters or exits through the upper hole of the housing, a nozzle stem which is extended from the nozzle head and is arranged in an inner space of the housing, and a nozzle stopper which is extended from the nozzle stem and is arranged on the outside of the lower hole not to enter the housing; and a spring which is installed in the housing to deflect the nozzle head upwards. |
