| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress a rise of a temperature in a valve chamber of an introduction valve which introduces a halogen-containing gas into an external device, and to suppress surface corrosion in the valve chamber of the introduction valve and the deterioration of a seal material used in the introduction valve. <P>SOLUTION: The halogen-containing gas supply device which supplies the halogen-containing gas to the external device 101 from a vessel which is filled with the halogen-containing gas at high pressure comprises: a supply pipe 4 which connects the vessel 1 and the external device 101; and a supply valve 3 which is arranged at the supply pipe 4, and supplies the halogen-containing gas from the vessel 1. A circulation direction change mechanism for changing the circulation direction of the halogen-containing gas is formed in a pipe at a part of the supply pipe 4 downstream of the supply valve 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
