DLC COATING APPARATUS USING FILTERED CATHODE VACUUM ARC

摘要

The present invention relates to a DLC coating apparatus using filtered vacuum arc plasma comprising: an arc plasma generation part which generates plasma ion by generating spark at a target object of a graphite material installed in a main chamber; a transportation pipe which provides a transportation path to transport the plasma ion generated in the arc plasma generation part to a DLC coated substrate; a magnetic force generation part which makes non-ionized particles of a material transported through the transportation pipe be focused on an inner wall by a magnetic force; and at least one filter board installed to cross the transportation pipe in the transportation pipe, and formed in a net shape in order to block transportation of the non-ionized particles. According to the DLC coating apparatus using the filtered vacuum arc plasma, film quality of a DLC film can be improved by being able to block transportation of giant particles non-ionized by a net type filter board installed to cross an extension direction of the transportation pipe.