发明名称 |
HANDLE SUBSTRATE, COMPOSITE SUBSTRATE FOR SEMICONDUCTOR, AND SEMICONDUCTOR CIRCUIT SUBSTRATE AND METHOD FOR MANUFACTURING SAME |
摘要 |
It is provided a handle substrate of a composite substrate for a semiconductor. The handle substrate is composed of a translucent polycrystalline alumina. A purity of alumina of the translucent polycrystalline alumina is 99.9% or higher, an average of a total forward light transmittance of the translucent polycrystalline alumina is 60% or higher in a wavelength range of 200 to 400 nm, and an average of a linear light transmittance of the translucent polycrystalline alumina is 15% or lower in a wavelength range of 200 to 400 nm. |
申请公布号 |
EP2978009(A1) |
申请公布日期 |
2016.01.27 |
申请号 |
EP20140873693 |
申请日期 |
2014.12.16 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
MIYAZAWA, SUGIO;IWASAKI, YASUNORI;TAKAGAKI, TATSURO;IDE, AKIYOSHI;NAKANISHI, HIROKAZU |
分类号 |
H01L21/02;C01F7/02;C04B35/115;C04B35/64;C04B37/00;H01L21/683;H01L21/762;H01L23/15;H01L27/12;H01L29/06 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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