发明名称 ELECTRONIC COMPONENT TRANSFER APPARATUS AND ELECTRONIC COMPONENT INSPECTION APPARATUS
摘要 The electronic component transfer apparatus comprises a transfer unit which transfers an electronic component, and a member to arrange the electronic component and perform at least one side of heating and cooling of the electronic component. When the transfer unit stops, and the electronic component is positioned at a first position, the apparatus stops the transfer unit, and when the electronic component is positioned at a second position positioned more distant than the first position from the member, the apparatus transfers the electronic component to the first position and then stops the transfer unit.
申请公布号 KR20160010287(A) 申请公布日期 2016.01.27
申请号 KR20150014815 申请日期 2015.01.30
申请人 SEIKO EPSON CORPORATION 发明人 SHIMIZU HIROYUKI;YAMAZAKI TAKASHI;MAEDA MASAMI
分类号 H01L21/677;H01L21/66 主分类号 H01L21/677
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