发明名称 載置用部材
摘要 <P>PROBLEM TO BE SOLVED: To provide a mounting member capable of maintaining a placed sample to a constant temperature. <P>SOLUTION: A mounting member 1 having a flow channel 6 includes: a first base plate 3 of ceramic having one main surface on which a sample 2 is placed, and the other main surface formed with a groove 8 defining an inner wall of the flow channel 6; a second base plate 4 of ceramic, one main surface of which is connected to the other main surface of the first base plate 3; and a junction layer 5 of glass having the thermal conductivity lower than that of the first base plate 3 interposed between the first base plate 3 and the second base plate 4. One main surface of the second base plate 4 has a first area 9 connected to the other surface of the first base plate 3 via the junction layer 5 and a second area 10 that defines the inner wall of the flow channel 6 and the second area 10 is flush with the first area 9. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5848043(B2) 申请公布日期 2016.01.27
申请号 JP20110145099 申请日期 2011.06.30
申请人 京セラ株式会社 发明人 井上 徹彌
分类号 H01L21/683;H01L21/027 主分类号 H01L21/683
代理机构 代理人
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