| 摘要 |
<p>A curved array of micromachined transducers (MUTs, 17) is arranged on an outer (6) surface of a substrate (15). In accordance to the invention, a curvature profile of the curved array is defined by a residual stress distribution within the substrate (15). The substrate (15) further comprises at least two layers, wherein the residual stress distribution within the substrate (15) may be determined by at least two layers of which a first layer (21) has a first thermal expansion coefficient value (e1); and a second layer (22) has a second thermal expansion coefficient value (e2), which differs from the first thermal expansion coefficient value.</p> |
