发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
A semiconductor device may include: a first gate structure and a second gate structure formed on a substrate; source/drain regions adjacent to the first gate structure; an interlayer dielectric layer which covers the source/drain regions and the first gate structure and the second gate structure; a source/drain contact hole etching the interlayer dielectric layer to expose the source/drain regions; a trench which exposes an upper surface of the second gate structure; a source/drain contact plug which touches the source/drain region and is formed in the source/drain contact hole; and a resistance pattern which touches the second gate structure and is formed in the trench. |
申请公布号 |
KR20160009755(A) |
申请公布日期 |
2016.01.27 |
申请号 |
KR20140089749 |
申请日期 |
2014.07.16 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SONG, HYUN SEUNG |
分类号 |
H01L21/28;H01L21/31;H01L21/336 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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