发明名称 METAL GATE STRUCTURE AND MANUFACTURING METHOD THEREOF
摘要 The present disclosure provides a semiconductor structure which includes a gate structure disposed over a substrate. The gate structure includes: a high-k dielectric layer, and a work function structure. The high-k dielectric layer includes: a base portion, and a side portion. The side portion is extended from an end unit of the base portion, and is substantially orthogonal to the base portion. The work function structure includes: a first metal disposed over the high-k dielectric layer; and a second metal disposed over the first metal, and including a sidewall portion extended from an end unit of a bottom portion. The first metal includes a material different from the second metal. The length of an interface between the sidewall portion and the bottom portion to the length of the bottom portion inside the high-k dielectric layer has a predetermined ratio.
申请公布号 KR20160010273(A) 申请公布日期 2016.01.27
申请号 KR20140188340 申请日期 2014.12.24
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 KUANG SHIN JIUN;YU TSUNG HSING;SHEU YI MING;LEE CHUN YI
分类号 H01L29/49 主分类号 H01L29/49
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