SURFACE-POTENTIAL DISTRIBUTION MEASURING DEVICE

摘要

A surface-potential distribution measuring device (1) has: a laser light source (13); a Pockels crystal (11); a mirror; a photodetector (16) that detects light intensity of the laser beam reflected by the mirror; a holding and mounting part that holds and moves the Pockels crystal (11); a voltage correction database; and a calculation unit that identifies an input voltage corresponding to a testing output voltage as a surface potential of the electric-field-reduction system (3). The Pockels crystal (11) is formed in such a way that a size of a cross section of the Pockels crystal (11) that is perpendicular to an axial direction changes along the axial direction. The holding and mounting part (30) has a protection unit (31) to protect a structure of the Pockels crystal, a movement unit to (35) that moves the Pockels crystal in order to measure a surface potential of the electric-field-reduction system, and a drive control unit (37) to control the movement unit (35), (36).