| 摘要 |
The invention relates to a method for measuring a high accuracy height map of a test surface using a multi sensor optical profiler. The method comprises:
measuring a coarse height map of the test surface with a pre-map sensor provided to the optical profiler with a relatively long working distance and/or a large field of view;
storing the coarse height map in a memory;
subdividing the coarse height map into sections as appropriate for the field of view of a relatively high resolution optical profiler sensor provided to the optical profiler;
calculating the corresponding X, Y and Z positions for the high resolution optical profiler sensor with respect to the test surface;
calculating a trajectory in the X, Y, Z-direction for the high resolution optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions;
moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory; and,
measuring a high accuracy height map with the high resolution optical profiler sensor. |
