| 发明名称 | Apparatus and methods for generating electromagnetic radiation | ||
| 摘要 | An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system. | ||
| 申请公布号 | US9245730(B2) | 申请公布日期 | 2016.01.26 |
| 申请号 | US201214379470 | 申请日期 | 2012.02.24 |
| 申请人 | Mattson Technology, Inc. | 发明人 | Kamdar Amar B.;Camm David Malcolm;Bumbulovic Mladen;Lembesis Peter |
| 分类号 | H01J1/02;H01J61/10;H01J61/52;H01J61/84 | 主分类号 | H01J1/02 |
| 代理机构 | Knobbe, Martens, Olson & Bear, LLP | 代理人 | Knobbe, Martens, Olson & Bear, LLP |
| 主权项 | 1. An apparatus for generating electromagnetic radiation, the apparatus comprising: a) an envelope; b) a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope; c) first and second electrodes within the envelope configured to generate a plasma arc therebetween; d) an insulative housing surrounding at least a portion of an electrical connection to one of the electrodes; e) a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing; and f) a cooling system configured to cool the shielding system. | ||
| 地址 | Fremont CA US | ||