Infrared detector including broadband light absorber

摘要

An infrared detector capable of detecting an infrared spectrum having a wide bandwidth using a broadband light absorber. The infrared detector including a substrate, a light absorber disposed apart from the substrate at a distance, and a pair of thermal legs configured to support the light absorber such that the light absorber is spaced apart from the substrate by the distance. The light absorber includes at least one thermistor layer having a resistance value that varies according to temperature and at least two resonator layers disposed on at least one of upper and lower surfaces of the at least one thermistor layer.

主权项

1. An infrared detector comprising:
a substrate; a light absorber disposed apart from the substrate at a distance; and a pair of thermal legs configured to support the light absorber such that the light absorber is spaced apart from the substrate by the distance, the light absorber including,
at least one thermistor layer having a resistance value that varies according to a temperature,at least two resonator layers disposed on at least one of an upper surface and a lower surface of the at least one thermistor layer, each of the at least two resonator layers being patterned in a shape such that the at least two resonator layers have at least two resonant parts configured to absorb light having resonant frequencies, the at least two resonant parts having different resonant modes, andan insulation layer disposed between the at least one thermistor layer and each of the at least two resonator layers.