发明名称 Spectroscope and microspectroscopic system
摘要 A spectroscope used for a microspectroscopic system includes: a collimating optical system that causes signal light to be substantially collimated light; spectroscopic optical systems and each of which includes at least one of each of spectral elements and in which a wavelength band for spectral separation varies depending on an incident angle of the signal light; at least one of each of optical receivers that detect the signal light spectrally separated by the spectroscopic optical systems; a mechanism that varies the incident angles of the signal light on the spectral elements; and a controller unit that determines the incident angles of the signal light on the spectral elements in accordance with the wavelength band for spectrally separating the signal light and controls the mechanism so as to attain the incident angles.
申请公布号 US9243955(B2) 申请公布日期 2016.01.26
申请号 US201414448334 申请日期 2014.07.31
申请人 NIKON CORPORATION 发明人 Sataka Ryoichi;Osawa Hisao
分类号 G01J3/30;G01J3/44;G01N21/64;G02B21/00;G01J3/02;G01J3/12 主分类号 G01J3/30
代理机构 Oliff PLC 代理人 Oliff PLC
主权项 1. A spectroscope comprising: a collimating optical system that causes light to be substantially collimated light; a spectroscopic optical system including at least one spectral element in which a wavelength band for spectral separation varies depending on an incident angle of the light, wherein the spectroscopic optical system comprises a first optical element that transmits a part of the incident light and reflects the rest thereof, and a second optical element that reflects at least part of the light reflected by the first optical element, and at least one of the first optical element and the second optical element is the spectral element in which the wavelength band for spectral separation varies depending on the incident angle of the light; at least one optical receiver that detects the light spectrally separated by the spectroscopic optical system; a mechanism that varies the incident angle of the light on the spectral element; and a controller unit that determines the incident angle of the light on the spectral element in accordance with the wavelength band for spectrally separating the light and controls the mechanism so as to attain the incident angle, wherein the controller unit further controls the mechanism to vary a direction of an incident surface of the first optical element and controls, in accordance with variation of the direction of the incident surface of the first optical element, the mechanism to vary a direction of an incident surface of the second optical element.
地址 Tokyo JP