Gas sensor

摘要

A gas sensor on a semiconductor substrate. The gas sensor includes an elongate sensor element extending across an opening and has first and second opposed surfaces exposed for contact with a gas to be sensed. The first surface faces away from a major surface of the substrate. The second surface faces toward said major surface. The electrical conductivity of the elongate sensor element is sensitive to a composition and/or concentration of said gas to which the opposed first and second surfaces are exposable. The gas sensor further includes a support structure arranged to increase the mechanical robustness of the gas sensor by supporting the elongate sensor element in the opening.

主权项

1. A gas sensor on a semiconductor substrate, the gas sensor comprising:
an elongate sensor element extending across an opening and having first and second opposed surfaces exposed for contact with a gas to be sensed, wherein the first surface faces away from a major surface of the substrate, wherein the second surface faces toward said major surface, and wherein an electrical conductivity of the elongate sensor element is sensitive to at least one of a composition and a concentration of said gas to be sensed; and a support structure directly exposed to the opening, and attached to the first surface of the sensor element at regular intervals over the opening, such that over the opening the sensor element is not continuously attached to the support structure, wherein a majority of the first surface of the sensor element remains available for gas contact while attached to the support structure.