Method and system for in-line real-time measurements of layers of multilayered front contacts of photovoltaic devices and calculation of opto-electronic properties and layer thicknesses thereof

摘要

A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.

主权项

1. A method of monitoring formation of a transparent conductive oxide (TCO) stack formed on a substrate, the TCO stack comprising a plurality of layers, the method comprising:
acquiring a first set of optical data from a first optical measurement system, the first set of optical data being transmission and/or reflection of a first optical signal passing through and/or reflected from an intermediate stack comprising less than all of the plurality of layers of the TCO stack; acquiring a second set of optical data from a second optical measurement system, the second set of optical data being transmission and/or reflection of a second optical signal passing through and/or reflected from the plurality of layers of the TCO stack; and using the first and second sets of optical data to determine at least one of a layer thickness and an optical constant value of at least one of the plurality of layers of the TCO stack.