| 发明名称 | Charged particle beam specimen inspection system and method for operation thereof | ||
| 摘要 | A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening at which a conductive membrane is provided which is positioned between the flood gun and the specimen support table. | ||
| 申请公布号 | US9245709(B1) | 申请公布日期 | 2016.01.26 |
| 申请号 | US201414499843 | 申请日期 | 2014.09.29 |
| 申请人 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 发明人 | Frosien Jürgen |
| 分类号 | H01J37/02;H01J37/145;H01J37/28 | 主分类号 | H01J37/02 |
| 代理机构 | Kilpatrick Townsend & Stockton LLP | 代理人 | Kilpatrick Townsend & Stockton LLP |
| 主权项 | 1. A charged particle beam specimen inspection system, comprising: an emitter for emitting at least one charged particle beam; a specimen support table configured for supporting a specimen; an objective lens for focusing the at least one charged particle beam; a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam; and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening at which a conductive membrane is provided which is positioned between the flood gun and the specimen support table. | ||
| 地址 | Heimstetten DE | ||