| 发明名称 |
Apparatus for transferring substrate |
| 摘要 |
Disclosed is an apparatus for transferring substrates capable of stably transferring substrates by using magnetic levitation. The apparatus includes a substrate stage including a substrate loading unit, a first guide block disposed at a first end of the substrate stage and including a first magnet generator, a second guide block disposed at a second end of the substrate stage and including a second magnet generator, a first guide rail accommodating the first magnet generator and including a third magnet generator, and a second guide rail accommodating the second magnet generator and including a fourth magnet generator. The first magnet generator and the third magnet generator exert repulsive force on each other, and the second magnet generator and the fourth magnet generator exert repulsive force on each other. |
| 申请公布号 |
US9246377(B2) |
申请公布日期 |
2016.01.26 |
| 申请号 |
US201414505712 |
申请日期 |
2014.10.03 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
Fukasawa Takayuki;Moon Yeon-Keon;Sohn Sang-woo;Kishimoto Katsushi;Shin Sang-Won |
| 分类号 |
B65G35/00;H02K41/03;H01L21/677;H02K7/09 |
主分类号 |
B65G35/00 |
| 代理机构 |
|
代理人 |
Bushnell, Esq. Robert E. |
| 主权项 |
1. An apparatus for transferring substrates, comprising:
a substrate stage including a substrate loading unit; a first guide block disposed at a first end of the substrate stage and including a first magnet generator; a second guide block disposed at a second end of the substrate stage and including a second magnet generator; a first guide rail accommodating the first magnet generator and including a third magnet generator; and a second guide rail accommodating the second magnet generator and including a fourth magnet generator, the first magnet generator and the third magnet generator exerting repulsive force on each other, and the second magnet generator and the fourth magnet generator exerting repulsive force on each other. |
| 地址 |
Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do KR |
