发明名称 |
Automated multiple location sampling analysis system |
摘要 |
An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location. |
申请公布号 |
US9243956(B2) |
申请公布日期 |
2016.01.26 |
申请号 |
US201313746108 |
申请日期 |
2013.01.21 |
申请人 |
SciAps, Inc. |
发明人 |
Day David |
分类号 |
G01J3/00;G01J3/443;G01J3/06;H01L21/66;G01J3/02;G01J3/44 |
主分类号 |
G01J3/00 |
代理机构 |
Iandiorio Teska & Coleman, LLP |
代理人 |
Iandiorio Teska & Coleman, LLP |
主权项 |
1. An analysis method comprising:
adjusting a moveable optic in a moving spot cycle; activating a laser source emitting a beam striking the moveable optic creating a plasma generating photons at multiple locations on a sample; analyzing the photons at each location; and automatically terminating the moving spot cycle if the analysis of the photons indicates the sample is homogeneous. |
地址 |
Woburn MA US |