发明名称 Automated multiple location sampling analysis system
摘要 An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.
申请公布号 US9243956(B2) 申请公布日期 2016.01.26
申请号 US201313746108 申请日期 2013.01.21
申请人 SciAps, Inc. 发明人 Day David
分类号 G01J3/00;G01J3/443;G01J3/06;H01L21/66;G01J3/02;G01J3/44 主分类号 G01J3/00
代理机构 Iandiorio Teska & Coleman, LLP 代理人 Iandiorio Teska & Coleman, LLP
主权项 1. An analysis method comprising: adjusting a moveable optic in a moving spot cycle; activating a laser source emitting a beam striking the moveable optic creating a plasma generating photons at multiple locations on a sample; analyzing the photons at each location; and automatically terminating the moving spot cycle if the analysis of the photons indicates the sample is homogeneous.
地址 Woburn MA US