| 摘要 |
The present invention provides a substrate providing system. The system includes: a first chamber including a gate; a second chamber including a gate, and connected to the first chamber; a sensor part including a sensor sensing a substrate on a transfer route of the substrate; a calculating part calculating a substrate sensing time by using substrate sensing start and termination information, inputted from the sensor part in a process of transferring the substrate, and comparing the calculated substrate sensing time to a standard time when the sensor part senses a normal substrate in a process of transferring the normal substrate, and therefore, determining whether the substrate is normal or abnormal; and a transfer part transferring the substrate between the first chamber and the second chamber. |
