发明名称 |
Surface treatment liquid, surface treatment method, hydrophobilization method, and hydrophobilized substrate |
摘要 |
Disclosed is a surface treatment liquid which enables simple and efficient hydrophobilization of a substrate and prevention of collapse of a resin pattern or etched pattern. Also disclosed are a surface treatment method using the surface treatment liquid, a hydrophobilization method using the surface treatment liquid, and a hydrophobilized substrate. When a substrate is hydrophobilized, the substrate is coated with a surface treatment liquid containing a silylating agent and a hydrocarbon non-polar solvent. When a pattern is prevented from collapse, the surface of a resin pattern formed on a substrate or etched pattern formed on a substrate by etching is treated using a surface treatment liquid containing a silylating agent and a solvent. |
申请公布号 |
US9244358(B2) |
申请公布日期 |
2016.01.26 |
申请号 |
US200913123341 |
申请日期 |
2009.09.15 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
Koshiyama Jun;Wakiya Kazumasa |
分类号 |
C09K3/18;G03F7/40;H01L23/29;G03F7/16;H01L21/306;G03F7/20 |
主分类号 |
C09K3/18 |
代理机构 |
Knobbe Martens Olson & Bear LLP |
代理人 |
Knobbe Martens Olson & Bear LLP |
主权项 |
1. A surface treatment liquid comprising at least one silylating agent selected from the group consisting of N,N-dimethylaminotrimethylsilane (DMATMS), hexamethyldisilazane (HMDS) and trimethylsilyloxy-3-penten-2-one (TMSP), and at least one nonpolar solvent selected from the group consisting of n-nonane, methyloctane, n-decane, n-undecane, n-dodecane, menthane and pinane, wherein the surface treatment liquid is in liquid form when applied to a substrate. |
地址 |
Kawasaki-Shi JP |