| 发明名称 |
Optical filter and method for the production of the same, and device for the examination of electromagnetic radiation |
| 摘要 |
An optical filter array includes a substrate permeable to an electromagnetic radiation to be detected, a first DBR mirror arranged on the substrate, a second DBR minor arranged above the first DBR mirror, and a plurality of cavity sections. The cavity sections have different respective optical lengths, and are arranged so as to be spatially separated from each other between the first DBR mirror and the second DBR mirror. Each of the first DBR mirror, the second DBR mirror, and the plurality of cavity sections with different optical lengths form filter elements of a filter. The filter reflects in a stopband determined by the first DBR mirror and the second DBR mirror. Each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. A different thicknesses of the cavity sections is provided via a nanoimprint process. |
| 申请公布号 |
US9244208(B2) |
申请公布日期 |
2016.01.26 |
| 申请号 |
US201314094804 |
申请日期 |
2013.12.03 |
| 申请人 |
BIOZOOM TECHNOLOGIES, INC. |
发明人 |
Hillmer Hartmut;Koecher Wolfgang;Krieg Juergen;Sandhagen Carl;Hoheisel Hardy;Willemer Winfried |
| 分类号 |
G01B9/02;G02B5/28;B82Y10/00;B82Y40/00;G01J3/02;G01J3/28;G01J3/36;G02B5/20;H01L27/146;A61B5/00;G01J3/44;G01J3/51;G03F7/00 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
Thot Norman B. |
| 主权项 |
1. An optical filter array comprising:
a substrate permeable to an electromagnetic radiation to be detected; a first DBR mirror arranged on the substrate; a second DBR minor arranged above the first DBR minor; and a plurality of cavity sections with different respective optical lengths arranged so as to be spatially separated from each other between the first DBR mirror and the second DBR minor by a respective separating area having a thickness which is less than each of the different respective optical lengths, the plurality of cavity sections and each respective separating area having a same cavity material, wherein, each of the first DBR minor, the second DBR mirror and the plurality of cavity sections with different optical lengths form filter elements of a filter, the filter reflects in a stopband determined by the first DBR mirror and the second DBR minor, and each filter element has at least one narrow transmission band determined by the optical length of its respective cavity section located inside the stopband. |
| 地址 |
Agoura Hills CA US |
