发明名称 MOLD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
摘要 The present invention relates to a mold, an imprint apparatus, and an article production method. The mold includes a plurality of pattern regions having two sides parallel to a first direction and other two sides parallel to a second direction. The pattern regions are positioned in a way that another pattern region can exist on the region of the mold except on a first region and a second region. With respect to each of the pattern regions, the first region is located between two straight lines formed by which two sides parallel to the first direction extends in the first direction. The second region is located between two straight lines formed by which two sides parallel to the second direction extends in the second direction.
申请公布号 KR20160009498(A) 申请公布日期 2016.01.26
申请号 KR20150096992 申请日期 2015.07.08
申请人 CANON KABUSHIKI KAISHA 发明人 SAKAMOTO EIJI;TANAKA YUSUKE
分类号 G03F7/00 主分类号 G03F7/00
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