Probe head assemblies, components thereof, test systems including the same, and methods of operating the same

摘要

Probe head assemblies, components of probe head assemblies, test systems including the probe head assemblies and/or components thereof, and methods of operating the same. The probe head assemblies are configured to convey a plurality of test signals to and/or from a device under test and include a space transformer, a contacting assembly, and a riser that spatially separates the space transformer from the contacting assembly and conveys the plurality of test signals between the space transformer and the contacting assembly. The contacting assembly may include a frame that defines an aperture and has a coefficient of thermal expansion that is within a threshold difference of that of the device under test, a flexible dielectric body that is attached to the frame, maintained in tension by the frame, and extends across the aperture, and a plurality of conductive probes. The plurality of conductive probes may include a dual-faceted probe tip.

主权项

1. A contacting assembly for contacting a device under test, the contacting assembly comprising:
a frame that defines an aperture; a flexible dielectric body that is operatively attached to the frame and extends across the aperture; and a plurality of conductive probes that is operatively attached to the flexible dielectric body, wherein: (i) the contacting assembly is configured to be mounted in a probe head of a test system; (ii) the frame is configured to maintain a plurality of conductive contacts between the plurality of conductive probes and a riser of the probe head during operation of the test system; (iii) the riser separates the flexible dielectric body from a space transformer of the probe head; and (iv) an upper surface of the frame does not extend past an upper surface of the space transformer.