SILICON THIN FILM SOLAR CELL HAVING IMPROVED HAZE AND METHODS OF MAKING THE SAME.

摘要

A method of increasing the haze of a coating stack having a top layer (18) and an undercoating layer (16) using a chemical vapor deposition coating process includes at least one of: increasing a precursor flow rate; decreasing a carrier gas flow rate; increasing a substrate temperature; increasing a water flow rate; decreasing an exhaust flow rate; and increasing a thickness of at least one of the top layer or undercoating layer.