发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes a fin structure disposed on a substrate, and extending in a first direction; a sacrificial layer pattern disposed on the fin structure in the first direction to be separated; an active layer pattern extended on the sacrificial layer pattern in the first direction; a gate structure extended on the active layer pattern in the second direction crossing the first direction; and an oxidative layer pattern arranged on the lower part of the gate structure, and arranged between the separated sacrificial layer pattern. Provided is a semiconductor device having improved operation properties. |
申请公布号 |
KR20160008441(A) |
申请公布日期 |
2016.01.22 |
申请号 |
KR20140103863 |
申请日期 |
2014.08.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
BAE, DONG IL;SEO, KANG ILL |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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