发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 Provided are a semiconductor device and a method for fabricating the same. The semiconductor device includes a fin structure disposed on a substrate, and extending in a first direction; a sacrificial layer pattern disposed on the fin structure in the first direction to be separated; an active layer pattern extended on the sacrificial layer pattern in the first direction; a gate structure extended on the active layer pattern in the second direction crossing the first direction; and an oxidative layer pattern arranged on the lower part of the gate structure, and arranged between the separated sacrificial layer pattern. Provided is a semiconductor device having improved operation properties.
申请公布号 KR20160008441(A) 申请公布日期 2016.01.22
申请号 KR20140103863 申请日期 2014.08.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE, DONG IL;SEO, KANG ILL
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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