| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy in measuring gas pressure.SOLUTION: A manufacturing method for a sensor module 10, which heats an electric resistor 20 exposed to gas and outputs a change in temperature of the electric resistor 20 generated according to gas pressure as a change in a resistance value of the electric resistor 20, includes: a first step of forming an insulator layer 14 as an oxide film or nitride film on a substrate 11; and a second step of forming a conductor layer 21 as the electric resistor on the insulator layer 14 under the condition that temperature is in a range of from 300 degrees to 600 degrees. |
