LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD USING THE SAME

摘要

A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.

主权项

1. A laser annealing apparatus comprising an optical system which comprises:
a first beam splitter configured to split a laser beam emitted from a laser source into a reflection light beam and a transmission light beam; a second beam splitter configured to split the reflection light beam into a first split beam and a second split beam; a third beam splitter configured to split the transmission light beam into a third split beam and a fourth split beam; a first beam vibrator configured to move the first split beam's path to cause vibrational movement of an irradiation point of the first split beam in a predetermined plane; a first beam inverter configured to invert the second split beam; a second beam vibrator configured to move the fourth split beam's path to cause vibrational movement of an irradiation point of the fourth split beam in a predetermined plane; a second beam inverter configured to invert the fourth split beam; and a beam collector configured to collect the first, second, third, and fourth split beams to provide an output laser beam to be irradiated to a surface subject to laser annealing.