发明名称 |
PRESSURE-BASED MASS FLOW CONTROLLER WITH REVERSE FLOW MODE FOR FAST BLEED DOWN |
摘要 |
A gas delivery apparatus to overcome the shortcomings of the prior art by evacuating process gas upstream of a pressurized volume with a reverse flow mode. |
申请公布号 |
US2016018828(A1) |
申请公布日期 |
2016.01.21 |
申请号 |
US201514700125 |
申请日期 |
2015.04.29 |
申请人 |
MUDD Daniel T.;MUDD Patti J |
发明人 |
MUDD Daniel T.;MUDD Patti J |
分类号 |
G05D7/06;G05B15/02 |
主分类号 |
G05D7/06 |
代理机构 |
|
代理人 |
|
主权项 |
1. An electronic regulator to control delivery of a process gas to a semiconductor process at a specific mass flow rate, the electronic regulator using a reverse flow mode for fast bleed down of process gas responsive to a reduction to the specified mass flow rate, the electronic regulator comprising:
a processor; and a memory, storing:
a controller to determine whether to operate in a forward mode in which process gas flows downstream to an accumulated volume or a reverse mode in which process gas flows upstream out of an accumulated volume,a communication interface to receive external set points; anda sensor interface to receive a current reading. |
地址 |
Reno NV US |