ELECTROCHEMICAL CHARACTERIZATION OF PLATING SOLUTIONS AND PLATING PERFORMANCE

摘要

A process for quantifying, by means of soft modeling, the characteristics of an electroplating solution is provided. The process includes (a) obtaining a sample set, wherein each sample comprises a plating solution of proper performance, (b) obtaining an electrochemical response (in form of a tensor) for each of the sample to produce a multi-way electrochemical response data set, (c) obtaining a training set that comprises the sample set and corresponding the multi-way electrochemical response data set, (d) analyzing the training set by soft modeling using multi-way decomposition method coupled with outlier-detection analysis methods to produce a outlier-detection parameters data set, and (e) validating said training data set by soft modeling to produce the multi-way predictive data set for a predictive model.

主权项

1. A process to produce a predictive multi-way data set which can be used to quantify by means of soft modeling the characteristics of a plating solution, said process comprising:
(a) obtaining a sample set, wherein each sample comprises a plating solution of proper performance; (b) obtaining an electrochemical response (in form of a tensor) for each said sample to produce a multi-way electrochemical response data set; (c) obtaining a training set that comprises said sample set and corresponding said multi-way electrochemical response data set; (d) analyzing said training set by soft modeling using multi-way decomposition method coupled with outlier-detection analysis method to produce a outlier-detection parameters data set; (e) validating said training data set by soft modeling to produce said multi-way predictive data set for a predictive model.