MIRROR DRIVE DEVICE AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To secure a magnetic field acting on a drive coil, and attain miniaturization when the drive coil is arranged in a surface on an opposite side of a mirror in a movable part.SOLUTION: A mirror drive device 1 comprises: a support part 20; a movable part 22; a permanent magnet 10 that forms a magnetic field around the movable part 22; and a wire substrate 12 that is arranged between the support part 20 and the permanent magnet 10 in an opposing direction of a pair of principal surfaces of the movable part 22 so that the movable part 22 is located on an inner side when viewed from the opposing direction. The movable part 22 includes: a mirror arrangement part 36; a mirror 48 that is arranged on a side of the principal surface 36b; and a drive coil 46 that is arranged on a side of the principal surface 36a so as to face the permanent magnet 10. The support 20 has: a base 24 that is connected to a connection member 38; and a reinforcement part 26 that extends from the base 24 toward a side away from the permanent magnet 10 and the wire substrate 12. The drive coil 46 is connected to electrodes 56a to 56d by lead-out conductors 42a to 42d.