| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized, low-cost physical quantity detector capable of attaining a highly accurate, high-speed correction effect under various system and operation conditions of an internal engine.SOLUTION: A physical quantity detector in which a concentration detection element and a pressure detection element are integrated on a substrate 2 including a hollow portion 3, is configured so that the pressure detection element and the concentration detection element are provided on a support film 5 that includes identical insulating films 4a, 4b, and 4c. That is, the physical quantity detector has a structure in which the support film 5 is commonly provided for supporting the pressure detection element and supporting the concentration detection element. |
