| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer robot capable of preventing interference with an external object as well as improving positioning accuracy.SOLUTION: First and second arm portions 36 and 37 are provided so as to be capable of relatively turning to each other. At a joint between the first and second arm portions 36 and 37, second turn-driving means 42 is provided. The second turn-driving means 42 has a second motor 76 and a second power transmission portion 77. The second motor 76 has a fixed part 78 fixed on the first arm portion 36, and a rotation part 79 that rotates with respect to the fixed part 78 around a rotation axis L22 substantially parallel to a direction in which the first arm portion 36 extends. The second power transmission portion 77 is interposed between the second motor 76 and the second arm portion 37 and transmits power of the second motor 76 from a rotation part 79 of the second motor 76 to the second arm portion 37. By such the second turn-driving means 42, the first and second arm portions 36 and 37 are turned and driven relative to each other. |
