TRACE STRUCTURE OF FINE-PITCH PATTERN

摘要

A trace structure of fine-pitch pattern includes a connection portion, a first conductive wire portion and a second conductive wire portion, the first conductive wire portion comprises a first section and a second section connected to the first section, the first section connects to the connection portion, the second conductive wire portion comprises a third section and a fourth section connected to the third section, the third section connects to the connection portion, wherein an etching space closed on three sides is formed by the connection portion, the third section and the first section, a first spacing is defined between the third section and the first section, a second spacing is defined between the fourth section and the second section, wherein the first spacing is larger than the second spacing so as to make an metal layer within the etching space completely removed to avoid metal layer residues.

主权项

1. A trace structure of fine-pitch pattern includes:
a connection portion; a first conducting wire portion having a first section and a second section connected to the first section, wherein the first section connects to the connection portion, the second section electrically connects to the connection portion via the first section; and a second conductive wire portion electrically connected to the first conductive wire portion via the connection portion, wherein the connection portion, the first conductive wire portion and the second conductive wire portion are the metal layers located on the same layer, the second conductive wire portion comprises a third section and a fourth section connected to the third section, wherein an etching space closed on three sides is formed by the connection portion, the third section and the fourth section, the fourth section electrically connects to the connection portion via the third section, wherein a first spacing is defined between the third section and the first section, a second spacing is defined between the fourth section and the second section, the first spacing is larger than the second spacing.