| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy sensitive resin composition, even in the case a polybenzoxazole precursor is heat-treated at a low temperature, giving a polybenzoxazole resin excellent in mechanical properties such as tensile elongation and chemical resistance, suppressed in coloring and high in transparency, a method for producing a polybenzoxazole a film or a polybenzoxazole molded body using the energy sensitive resin composition, and a pattern production method using the energy sensitive resin composition.SOLUTION: Provided is an energy sensitive resin composition comprising a polybenzoxazole precursor obtained by reacting aromatic diamine diol and a diformyl compound or dicarboxylic acid dihalide, a solvent and a compound (A) decomposed by the action of at least either light or heat to generate at least either a base or acid. |
