发明名称 METHOD FOR MANUFACTURING A MOLD FOR A FINE CHANNEL, METHOD FOR MANUFACTURING A DIE FOR A FINE CHANNEL, AND METHOD FOR MANUFACTURING A BLOCK FORMED ON WHICH A FINE CHANNEL IS FORMED
摘要 The present invention relates to a method for manufacturing a mold for a fine channel, a method for manufacturing a die for a fine channel, and a method for manufacturing a block on which a fine channel is formed. The method for manufacturing a mold for a fine channel comprises the following steps: forming a notch by forming gradient of crosslinking density in the depth direction of the photosensitive material layer by performing a photo lithography process on a substrate on which a photosensitive material layer is formed; exposing only an area where crack corresponding to a fine channel by the notch on the photosensitive material layer is not allowed; and cracking corresponding to the fine channel from the notch by developing the photosensitive material layer.
申请公布号 KR20160008048(A) 申请公布日期 2016.01.21
申请号 KR20140087653 申请日期 2014.07.11
申请人 UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION 发明人 KIM, TAE SUNG;KIM, MIN SEOK
分类号 B29C33/38;B29C33/44;G03F7/26 主分类号 B29C33/38
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