发明名称 |
METHOD FOR MANUFACTURING A MOLD FOR A FINE CHANNEL, METHOD FOR MANUFACTURING A DIE FOR A FINE CHANNEL, AND METHOD FOR MANUFACTURING A BLOCK FORMED ON WHICH A FINE CHANNEL IS FORMED |
摘要 |
The present invention relates to a method for manufacturing a mold for a fine channel, a method for manufacturing a die for a fine channel, and a method for manufacturing a block on which a fine channel is formed. The method for manufacturing a mold for a fine channel comprises the following steps: forming a notch by forming gradient of crosslinking density in the depth direction of the photosensitive material layer by performing a photo lithography process on a substrate on which a photosensitive material layer is formed; exposing only an area where crack corresponding to a fine channel by the notch on the photosensitive material layer is not allowed; and cracking corresponding to the fine channel from the notch by developing the photosensitive material layer. |
申请公布号 |
KR20160008048(A) |
申请公布日期 |
2016.01.21 |
申请号 |
KR20140087653 |
申请日期 |
2014.07.11 |
申请人 |
UNIST ACADEMY-INDUSTRY RESEARCH CORPORATION |
发明人 |
KIM, TAE SUNG;KIM, MIN SEOK |
分类号 |
B29C33/38;B29C33/44;G03F7/26 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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