DIRECT DRIVE MOTOR, CARRIER DEVICE, INSPECTION DEVICE, MACHINE TOOL, AND SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a direct drive motor which inhibits enlargement.SOLUTION: A direct drive motor includes: a motor part having a stator and a rotor which may rotate relative to the stator; a rotation detector which detects rotation of the motor part; a housing which holds the motor part and the rotation detector; a cable which is at least partially disposed in a hole provided on an outer surface of the housing; and a fixing mechanism which is disposed at the inner side of the hole and fixes the cable.