LENS ARRAY SUBSTRATE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPARATUS

摘要

A lens array substrate (counter substrate) includes a plurality of concaves (lens surface) made of a concave surface formed on one substrate surface (a surface side facing device substrate) of a light-transmitting substrate. In addition, a light-transmitting lens layer, a light-transmitting layer, a light-transmitting protective layer, a common electrode made of an ITO film, and a second alignment film made of an obliquely deposited film are sequentially laminated on the one substrate surface of the light-transmitting substrate. The light-transmitting layer is made of a silicon oxynitride film (light-transmitting layer containing nitrogen), and the protective layer is made of a light-transmitting material not containing nitrogen such as a silicon oxide film or an aluminum oxide film.

主权项

1. A lens array substrate comprising:
a light-transmitting substrate that has a lens surface, the lens surface includes a concave surface or a convex surface is formed on one side surface; a lens layer which covers one side surface of the substrate, the lens layer is light-transmitting and has a different refractive index from the substrate; a light-transmitting layer which contains nitrogen and is provided on a side opposite to the substrate with respect to the lens layer; a protective layer which covers a surface of the light-transmitting layer on a side opposite to the substrate, and is made of a light-transmitting material not containing nitrogen; and an ITO layer which is formed on a surface of the protective layer on a side opposite to the substrate.