FILM FORMING DEVICE AND FILM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film forming device which can form a film of desired quality by making a temperature of a discharged film material close to an optimum temperature.SOLUTION: An object is held on a stage. A film material is formed into droplets and is discharged to the object from a plurality of nozzle holes of a nozzle head. A moving mechanism moves one of the object and the nozzle head with respect to the other. A supply system supplies the film material to the nozzle head. The film material supplied to the nozzle head through the supply system is heated by a heating device. A temperature sensor measures a temperature of the nozzle head. A control device stores image data for defining a shape of a film to be formed on the object, and controls the nozzle head and the moving mechanism based on the image data to form a film having a shape defined by the image data on the object. The control device controls the heating device based on the image data and a measured temperature by the temperature sensor.