PROCESSING APPARATUS

摘要

A processing apparatus includes a chuck table for holding a plate-like workpiece under suction. A suction unit is connected to the chuck table, and a processing unit is configured to process the workpiece while supplying processing water to the workpiece. The suction unit includes a first suction source, a first pipe providing fluid communication between the first suction source and the chuck table, a separator arranged in the first pipe, for separating a gas and a liquid drawn in from the chuck table, and a water discharging unit configured to discharge the liquid separated by the separator. The water discharging unit includes a second suction source, a second pipe providing fluid communication between the second suction source and a water discharge port of the separator, and a check valve arranged in the second pipe, for preventing a fluid from flowing from the second suction source to the separator.

主权项

1. A processing apparatus comprising:
a chuck table for holding a plate-like workpiece under suction; suction means connected to said chuck table, for causing said chuck table to generate a suction force; and processing means for processing the plate-like workpiece held by said chuck table while supplying processing water to the plate-like workpiece; wherein said suction means includes:
a first suction source;a first pipe providing fluid communication between said first suction source and said chuck table;a separator arranged halfway in said first pipe, for separating a gas and a liquid drawn in from said chuck table; andwater discharging means for discharging the liquid separated by said separator;said water discharging means includes:a second suction source;a second pipe providing fluid communication between said second suction source and a water discharge port of said separator; anda check valve arranged in said second pipe, for preventing a fluid from flowing from said second suction source to said separator.