LASER IRRADIATION DEVICE

摘要

Provided is a laser irradiation device capable of driving a deflecting optical system (33) at high speed and coping with heat generated by the optical system with use of a compact and lightweight structure. The laser irradiation device (30) is equipped with: a focusing optical system (32) for focusing a laser beam (B) generated by a laser oscillator (10) on a predetermined focal point (FP); a deflecting optical system (33) for deflecting, by a predetermined deflection angle, the laser beam (B) exiting the focusing optical system (32); and a driving means (100) for driving the deflecting optical system (33) to rotate about a rotation axis which is arranged substantially parallel to the optical axis of the focusing optical system (32). The driving means (100) has an air motor (100) that converts the energy of a gas supplied from a gas supply source (60) into a rotating force.