发明名称 POSITIONING DEVICE FOR PROBE CARD, AND PROBE HOLDER
摘要 PROBLEM TO BE SOLVED: To provide a positioning device for a probe card, and a probe holder.SOLUTION: A positioning device includes a main opening, a first sub opening, a second sub opening, at least one positioning site, and at least one elastic site. The first sub opening and the second sub opening are arranged around the main opening so as to lead to the main opening. The at least one positioning site and the at least one elastic site compensate with each other. The at least one elastic site is positioned between the first sub opening and the second sub opening. Rigidity of the at least one positioning site is larger than rigidity of the at least one elastic site.
申请公布号 JP2016011956(A) 申请公布日期 2016.01.21
申请号 JP20150128827 申请日期 2015.06.26
申请人 MJC PROBE INC 发明人 CHEN TZU-YANG;HSIEH SHANG-JUNG;LEE CHUNG-TSE;CHEN TSUNG-YI;LI TIEN-CHIA;KUO CHIA-YUAN;LIN CHE-WEI
分类号 G01R1/06;G01R1/067;G01R31/26;H01L21/66 主分类号 G01R1/06
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