| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser machining device capable of improving dynamic position accuracy of a galvano-scanner.SOLUTION: A laser machining device includes a laser oscillator, a galvano-scanner, and a control device. The galvano-scanner includes: a galvano-mirror reflecting laser beam; a galvano-motor changing the angle of the galvano-mirror; an angle sensor detecting the angle of the galvano-mirror; and a galvano-controller controlling driving current of the galvano-motor on the basis of position command information, and angle information obtained from the angle sensor, and a plurality of preset parameters. A parameter storage part for storing the plurality of parameters is installed to measure follow-up data of the galvano-scanner to the position command of a prescribed measurement pattern, and to change the parameters in response to a characteristic value derived from the follow-up data. |
