| 摘要 |
The present invention relates to an error compensation device, for a lens array, comprising a first lens array, a condenser lens, a sensor, a second lens array, and a mask. The first lens array comprises a plurality of first cylindrical lenses having a convex emission surface and splits a laser beam which falls incident. The condenser lens combines on a measurement surface a plurality of laser beams, which have been split on the first lens array, into one. The sensor is provided on the measurement surface and detects whether or not the laser beam, which has been combined into one, is combined at a predetermined reference location and into a predetermined reference size. The second lens array is placed between the first lens array and the condenser lens with respect to the traveling direction of the laser beam, comprises a plurality of second cylindrical lenses having a convex emission surface, and corrects the path of a laser beam which is being emitted from the first lens array such that the laser beam emitted from the first lens array is combined at the reference location and into the reference size. The mask is placed between the first lens array and the second lens array with respect to the traveling direction of the laser beam and is provided with a penetrating portion for opening an incident surface of one of the plurality of second cylindrical lenses of the second lens array. |
