METHOD FOR PRODUCING INSTRUCTION DATA, POSITIONING DEVICE, LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method capable of producing instruction data for driving a movable body along a new locus without going through driving under learning control at the new locus.SOLUTION: The method for producing instruction data includes the steps of: obtaining first instruction data for driving a movable body 11 along a first locus with learning control against the movable body 11; and producing second instruction data for driving a movable body 11 along a second locus by using part of data of the first instruction data.