| 摘要 |
PROBLEM TO BE SOLVED: To suppress deformation in an object such as a wafer.SOLUTION: An absorption member comprises: a porous ceramic body having a flat absorption face; and a dense ceramic body having an external wall part surrounding the outer peripheral face of the porous ceramic body, and a base face abutting on the absorption face of the porous ceramic body, which face is opposite to the absorption face. The external wall part has: an internal peripheral face opposite to the outer peripheral face; and an upper face located in substantially the same plane as the absorption face. The absorption member vacuum absorbs, via the porous ceramic body, a target body placed on a placing face comprising the absorption face and the upper face. In the porous ceramic body, density near the outer peripheral face is higher than density near the position of the gravity center of the placing face. |
