发明名称 ION SOURCE
摘要 PROBLEM TO BE SOLVED: To provide an ion source in which filament consumption is suppressed.SOLUTION: The present invention is an ion source 30 for causing thermal electrons emitted from a filament 51 to collide against a sample to be measured and ionizing the sample to be measured, wherein the ion source 30 is provided with direction adjustment means 60 for causing the thermal electrons emitted from the filament 51 to advance in a second direction perpendicular to a first direction, and one end of the filament 51 is connected to a first support rod 52 so that the first support rod 52 is placed at a position that is a third direction of the filament 51, and the other end of the filament 51 is connected to a second support rod 53 so that the second support rod 53 is placed at a position that is a direction opposite the third direction of the filament 51.
申请公布号 JP2016011848(A) 申请公布日期 2016.01.21
申请号 JP20140132303 申请日期 2014.06.27
申请人 SHIMADZU CORP 发明人 SAWAMURA ISAO
分类号 G01N27/62;G01N27/64;G01N30/72;H01J49/14 主分类号 G01N27/62
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