| 发明名称 |
APPARATUS AND METHOD FOR ADJUSTING A PEDESTAL ASSEMBLY FOR A REACTOR |
| 摘要 |
The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired. |
| 申请公布号 |
US2016020137(A1) |
申请公布日期 |
2016.01.21 |
| 申请号 |
US201414336685 |
申请日期 |
2014.07.21 |
| 申请人 |
ASM IP HOLDING B.V. |
发明人 |
Halpin Michael |
| 分类号 |
H01L21/687;H01L21/68;F16D1/02 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor, the method comprising the steps of:
connecting a riser shaft of the pedestal assembly to a first end of an alignment assembly; connecting a drive shaft to a second end of the alignment assembly; and rotating a first portion of the alignment assembly axially to change the relative position of the plate with respect to the processing chamber. |
| 地址 |
Almere NL |
