发明名称 |
METAL OXIDE SEMICONDUCTOR LAYER FORMING COMPOSITION, AND METHOD FOR PRODUCING METAL OXIDE SEMICONDUCTOR LAYER USING SAME |
摘要 |
Provided is a composition for forming a metal oxide semiconductor that includes a solvent represented by general formula [1] and an inorganic metal salt. (In the formula, R1 represents a linear or branched C2-3 alkylene group, and R2 represents a linear or branched C1-3 alkyl group.) |
申请公布号 |
WO2016010052(A1) |
申请公布日期 |
2016.01.21 |
申请号 |
WO2015JP70204 |
申请日期 |
2015.07.14 |
申请人 |
NISSAN CHEMICAL INDUSTRIES, LTD. |
发明人 |
MAEDA, SHINICHI |
分类号 |
H01L21/368;C01G15/00;H01L21/336;H01L29/786 |
主分类号 |
H01L21/368 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|