发明名称 METAL OXIDE SEMICONDUCTOR LAYER FORMING COMPOSITION, AND METHOD FOR PRODUCING METAL OXIDE SEMICONDUCTOR LAYER USING SAME
摘要 Provided is a composition for forming a metal oxide semiconductor that includes a solvent represented by general formula [1] and an inorganic metal salt. (In the formula, R1 represents a linear or branched C2-3 alkylene group, and R2 represents a linear or branched C1-3 alkyl group.)
申请公布号 WO2016010052(A1) 申请公布日期 2016.01.21
申请号 WO2015JP70204 申请日期 2015.07.14
申请人 NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 MAEDA, SHINICHI
分类号 H01L21/368;C01G15/00;H01L21/336;H01L29/786 主分类号 H01L21/368
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