| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature-programmed desorption analyzer in which, when performing a temperature-programmed desorption analysis of a material containing a subliming metal and low molecular weight gas, sensitivity of a detector does not decrease, quantitative analysis of the gas content and identification of a trap site of the gas is possible, a sample table and an analytic method.SOLUTION: A temperature-programmed desorption analyzer comprises: a vacuum chamber; a detector; a sample stage; a heater; and a sample table consisting of a pair of a box and a lid in which a gold thin film is contained inside of the lid, or a temperature-programmed desorption analyzer comprises: a vacuum chamber; a detector; a filter installed in front of the detector, which includes a metal plate where a gold thin film is contained; a sample stage; a heater; and a sample table consisting of a box. A temperature-programmed desorption analytic method analyzing content of low molecular weight gas and a trap site comprises the steps of: detecting ionic strength of the low molecular weight gas desorbed from a material containing a subliming metal and the low molecular weight gas by use of the temperature-programmed desorption analyzer; and trapping subliming metallic vapor by the gold thin film and obtaining subliming desorption spectrum of the low molecular weight gas at the same time. |
